Based on our experience in designing and processing a 266nm lens, we have also designed a 193nm extreme ultraviolet imaging lens with the parameters shown in the table.
(We also accept clients' commissions to design optical systems for other spectra, such as 157nm, 121nm, etc.)
This 193nm lens is our latest design. Gradually put into production and push towards the market. We also accept customized non-standard optical systems from customers.
放大倍數(shù) Magnification | 規(guī)格型號 Model | 數(shù)值孔徑 NA | 工作距離 WD(mm) | 焦距 f’ (mm) | 分辨率 R (μm) 266nm | 焦深 DF (μm) 266nm | 物方視場 on object (mm) | 像方視場 on image (mm) | 螺紋尺寸 Screw |
10x | EUV010X | 0.40 | 20.00 | 20.0 | 0.54 | 2.95 | 20.00 | 20 | 0.8” |
20x | EUV020X | 0.50 | 20.00 | 10.0 | 0.45 | 2.05 | 10.00 | 20 | 0.8” |
40x | EUV040X | 0.60 | 10.00 | 4.0 | 0.38 | 1.50 | 0.50 | 20 | 0.8” |
50x | EUV057X | 0.70 | 5.26 | 4.0 | 0.27 | 0.73 | 0.40 | 20 | 0.8” |
50x | EUV058X | 0.80 | 10.00 | 4.0 | 0.23 | 0.54 | 0.40 | 20 | 0.8” |
80x | EUV080X | 0.90 | 4.85 | 2.5 | 0.18 | 0.20 | 0.25 | 20 | 0.8” |
100X | EUV175X | 0.75 | 5.14 | 2.0 | 0.24 | 0.40 | 0.20 | 20 | 0.8” |
100X | EUV100X | 0.90 | 3.54 | 2.0 | 0.18 | 0.20 | 0.20 | 20 | 0.8” |
Contact: Herry
NanJing KOZO Optical and Electronical Instrument Co.,Ltd
Sales Dep: 19E, DongYu Building, 18 ZhengHong Street, NanJing
Factory Add: A20 MuFu, 199 East Road MuFu, GuLou District, NanJing
Code: 210005 WeChat: 13357725973
Tel: 0086-25-84716665, 84715655, 84715659
Fax: 0086-25-84715556
Mail: [email protected]